Profile Measurement by Projecting Two Gratings with Different Pitches

Satoshi KAKUNAI; Koichi IWATA; Tohru SAKAMOTO

doi:10.1007/BF03254890

Satoshi KAKUNAI, Koichi IWATA, Tohru SAKAMOTO

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Keywords: profile measurement, two gratings, step height, phase-shifting technique, interference fringe, liquid crystal grating, sinusoidal grating

JOURNAL FREE ACCESS

1994 Volume 1 Issue 2 Pages 296-298

DOI https://doi.org/10.1007/BF03254890

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Abstract

A new method for measuring objects with steps is proposed in which two gratings with different pitches are projected on the object surface. The method is demonstrated with sinusoidal gratings made of laser interference fringes and also sinusoidal gratings formed by liquid crystal controlled by computer. An object with step height of 20 mm is measured with standard variation below 3%.

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