Theoretical Analysis of Super-Resolution Optical Disk

抄録

The super-resolution mastering of read-only optical disks using a photoreactive bleachable dye mask layer was theoretically analyzed. Equations have been derived which describe the photoreactions of the resist layer and mask layer. A numerical simulation based on these equations showed that the transmittance of the mask directly affects the quality of the formed pit shape. A high-quality pit shape is obtained by using a low transmittance mask.