Automatic Alignment of Optical System Using Shape Memory Alloy^*

抄録

Properties of the shape memory alloy of 29 μm thick Ni-Ti foil are investigated as an actuator to align optical elements. Since the intrinsic properties of the Ni-Ti foil are not satisfactory in reproducibility and hysteresis, a simple feedback control is used. A pinhole integrated with a surrounding position sensor is proposed to realize a confocal optical system having an automatic alignment function. Large displacement (~mm) and precision at the level of the optical wavelength are found to be possible.