Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Fundamental Lecture
What can we see with a scanning electron microscope?
Yoshikazu HOMMA
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JOURNAL FREE ACCESS

2010 Volume 79 Issue 8 Pages 754-757

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Abstract

Secondary electron images obtained with a scanning electron microscope reflect not only the macroscopic morphology of a sample but also the electric, crystallographic and chemical properties of the material, atomic-scale surface structures, and charge states. The contrasts caused by these factors are utilized for evaluating semiconductors and nanomaterials.

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© 2010 year The Japan Society of Applied Physics
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