Highly sensitive magnetic field and temperature measurement technique using SiC quantum sensors

Abstract

Solid-state quantum sensors are attracting attention as novel sensors capable of measuring magnetic fields, temperature, pressure, and other quantities with high sensitivity and spatial resolution. Quantum sensors using nitrogen-vacancy complexes (known as NV centers) in diamond are being studied for a variety of applications. Silicon carbide, which has been in practical use as a substrate material for power semiconductors, also has some defects that function as quantum sensors. This paper introduces the latest research trends on silicon vacancy-based quantum sensors, which enable direct observation inside power semiconductors.