応用物理
Online ISSN : 2188-2290
Print ISSN : 0369-8009
電氣容量法による粗さの測定
吉村 正夫福島 栄之助
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ジャーナル フリー

1954 年 23 巻 11 号 p. 522-526

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抄録
The possibility of measuring the roughness of metal surface by means of electrical capacitance with vinyl sheat as insulator has been confirmed. This method is considered available in practise, for the roughness H from 6 to 200 micron can be measured in a few seconds. By this method the mean space between a specimen and a metal plate is measured which gives the 3-dimensional roughness. The relation between the 3-dimensional and the 2-dimensional roughnesses regarding, for example, the maximum height H or the root mean square (rms), is discussed.
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