干渉測長機の実用化に関する研究 (I)
1962 年 31 巻 3 号 p. 192-200
詳細
1962 年 31 巻 3 号 p. 192-200
Theoretical investigation is made on electronic fringe counting interference comparator for the purpose of routine measurement of length. (1) A lens and mirror system is introduced as the movable reflector system of the interferometer. This catadioptric system plays the same role as that of a corner cube reflector system when a concave mirror is situated at the focal point of a convex lens. (2) Effects of temperature and atmospheric pressure can be automatically corrected if suitable Fabry-Perot etalons are assembled tandem to the interferometer and the spacer material of the etalons has the same thermal expansion coefficient as that of the part to be measured. Equal inclination fringes are different from those formed with an ordinary interferometer. (3) Effects are calculated on the visibility of fringes due to optical arrangement of reflector systems and spectral distribution of the light which passed through the etalon.
