応用物理
Online ISSN : 2188-2290
Print ISSN : 0369-8009
光学的表面解析装置
山本 巖
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ジャーナル フリー

1962 年 31 巻 7 号 p. 524-530

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抄録
A measuring system for obtaining informations on surface texture is proposed. The measuring instrument is composed of two parts, “pattern” producer and analyzer. The former transforms. surface cross-section profiles into “patterns” which have analogue contour curves of the crosssections. The transformation is achieved by recording the surface profile on a photografic film in the form of variable-area. The “pattern” is mounted on the out-side of a large diameter glass tube.
The latter is made up of a variable-area masking mechanism, rotatable mechanism, lense systems with light source and photocell. Feeding the “pattern” into the mechanism, one can obtain surface texture informations, i. e. average depth, depth of average line, center line average value, total height, form coefficient, loading curve and continuous average curve for arbitrary sampling length automatically or semiautomatically through optical process. The experiment conducted with an instrument made on trial shows that the above surface informations can be evaluated with accuracy of about 1% in error.
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