応用物理
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Cermet抵抗薄膜
原留 美吉樋口 達雄水野 英昭西村 浩一
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1963 年 32 巻 8 号 p. 576-580

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Cerment resistive films are prepared by the flash evaporation of Cr-SiO mixtures. The fol-lowing properties of evaporated Cr-SiO films are investigated: dependence of resistivity upon film composition and film thickness, temperature coefficient of resistivity and aging effects.
The results of these measurements indicate that the evaporated Cr-SiO film is more resistive than metal films and its temperature coefficient is small and very stable.

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