抄録
Transparent conducting films of tin oxide are prepared by thermal decomposition of a tin salt of an organic acid as a starting material. In order to investigate the doping effect, transparent conducting films of tin oxide containing antimony are prepared by thermal decomposition of the starting material mixed with a mixture made from tartaric acid and antimony oxide. These films were prepared on the microslide glass at the temperature range from 300°C to about 600°C in air, and the physical and electrical properties of the films were investigated.
From the study of thermal decomposition of the starting material, it was found that the various gases produced by the thermal decomposition were harmless.
The results of the structure analyses using X-ray diffraction pattern and electron micro-graph show that the films are polycrystals of tin oxide. Furthermore, the antimony in the tin oxide films doped with antimony was detected by an X-ray microanalyzer.
The experimental results of transmission and electrical properties of the films indicated that the effect of this doping material was very remakable.
This method, as compared with previous methods, is very convenient and simple for obtaining transparent conducting films with a comparatively low specific resistivity.
