マグネトロンスパッタの特徴とその応用
化合物スパッタ膜における興味ある現象
1979 年 48 巻 8 号 p. 760-770
詳細
1979 年 48 巻 8 号 p. 760-770
This review firstly describes two discharge modes in the magnetron sputtering. The first mode appears with a weak magnetic field below 1, 000G. In this mode the dominant space charge in the discharge is positive (PSC mode). The sputtering devices using the PSC mode are useful for making the interconnections and electrodes of semiconductor devices. The second mode appears with a strong magnetic field above 1, 000G. In this mode negative space charge is dominant (NSC mode).
The NSC mode is useful for making thin compound films at low temperatures. The structure, electrical properties and sputtering conditions of thin compound films such as oxides and nitrides prepared by the NSC mode are also described in this review.
