抄録
A survey of the current status on sputtering or erosion of solids induced by particle bombardment is given. It is pointed out that general features of the ion-induced sputtering of monatomic solids can be explained by assuming that the collision cascades of knocked-on atoms cause the sputtering. The derivation of the Sigmund theory based on collision cascades is explained in detail. Then discussions are made on the extent of the applicability of the theory and on the modification of the theory necessary to explain recent experimental results. The sputtering of alloys and compounds are shown to be not understood satisfactorily and the relevant experimental results are critically surveyed. It is also pointed out that electronic excitation in insulating solids causes sputtering and the recent studies on sputtering of alkali halides are discussed.
