遅延回路と平均処理回路を用いたプラズマ電子のエネルギー分布測定
1982 年 51 巻 8 号 p. 971-978
詳細
1982 年 51 巻 8 号 p. 971-978
A multi-scan system for measuring the electron energy distribution function in plasmas is developed, in which a digital time averaging circuit is combined with the previously reported delay element rapid scan differentiator (K. Shimizu and H. Amemiya: Oyobutsuri 49 (1980) 145).
Characteristics, design and circuit construction of the system are first explained. Results of application of the system to gas plasmas are then demonstrated. It is found that the signal to noise ratio increases almost proportionally to N, where N is the number of scanning, and further that the present method ensures higher reliability than the conventional alternating current method using a slow single scan.
