Formation Mechanism of Ceramics Thin Film in Aerosol Deposition Method (2nd report) —Influence of pre-process for starting powder to microstructure of deposited Layer—

Jun Akedo; Levedev Maxim; Hisato Ogiso; Tomokazu Ito; Hironori Hatono; Masakatsu Kiyohara

doi:10.14853/pcersj.2002F.0.424.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.424.0

Conference information

Host: The Ceramic Society of Japan

Formation Mechanism of Ceramics Thin Film in Aerosol Deposition Method (2nd report)

—Influence of pre-process for starting powder to microstructure of deposited Layer—

Jun Akedo, Levedev Maxim, Hisato Ogiso, Tomokazu Ito, Hironori Hatono, Masakatsu Kiyohara

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Keywords: Lead Zirconate Titanate, Alumina, dielectric, Aerosol Deposition Method, mechanochemical reaction, nano crystal, dynamic compaction

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 424

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Abstract

The influence of pre-procedure for starting powder to the microstructure and the deposition rate of the layer prepared by aerosol deposition method was investigated. In this method, high dense layers could be fabricated at normal temperature. Milling procedure decreased density of the layer, but heat treatment was effective to recover the density. The deposition properties were greatly influenced by starting powder properties.

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