Effects of substrate and wavelength on the crystallinity and surface morphology of alkoxy-derived zirconia thin films via UV irradiation

Abstract

Effects of substrate and wavelength on the crystallinity and surface morphology of UV irradiated zirconia thin films were investigated. The surface morphology of alkoxy-derived zirconia thin films changed in case of UV irradiation using an ultra-high pressure mercury lamp at room temperature. On the other hand, the crystallinity of zirconia thin films increased in case of UV irradiation using a low pressure mercury lamp at room temperature. The substrate and wavelength were considered to play important roles in the reaction.