Micropatterning of SnO2 thin films using hydrophobic-hydrophilic patterned surfaces

Takayuki Fujii; Kiyoharu Tadanaga; Atsunori Matsuda; Tsutomu Minami; Masahiro Tatsumisago

doi:10.14853/pcersj.2002F.0.437.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.437.0

Conference information

Host: The Ceramic Society of Japan

Micropatterning of SnO₂ thin films using hydrophobic-hydrophilic patterned surfaces

Takayuki Fujii, Kiyoharu Tadanaga, Atsunori Matsuda, Tsutomu Minami, Masahiro Tatsumisago

Author information

Keywords: SnO₂, hydrophobic-hydrophilic patterned surfaces, sol-gel method, micropatterns, transparent electrode

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 437

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Abstract

Hydrophobic-hydrophilic patterned surfaces were prepared by selective UV irradiation through a photomask on multilayered films of TiO₂ and FAS. SnO₂ precursor solution prepared from SnCl₂ and EtOH was coated on the hydrophobic-hydrophilic patterned surfaces. After a heat-treatment at various temperature, convexly shaped SnO₂ patterns were formed on hydrophilic area of the patterned surfaces. Thickness of these patterns was more than 1μm.

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