Fine Patterning Properties of Piezoelectric Thick Film Prepared with Aerosol Deposition

Jun Akedo; Levedev Maxim

doi:10.14853/pcersj.2002F.0.487.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.487.0

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Host: The Ceramic Society of Japan

Fine Patterning Properties of Piezoelectric Thick Film Prepared with Aerosol Deposition

Jun Akedo, Levedev Maxim

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Keywords: Lead Zirconate Titanate, Alumina, ferroelectric material, Aerosol Deposition Method, piezoelectric material, ceramic integration, micro-actuator

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Pages 487

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Abstract

The patterning properties of thick lead zirconate titanate (PZT) films prepared by aerosol deposition method were experimentally investigated. PZT thick film was deposited through the mask to make the micro-line pattern with 50μm width and aspect ratio: 1. During the deposition, adhesion and ablation of the particles were occurred. The deposition properties were strongly influenced by inclinations of the jet flow to the substrate.

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