抄録
Titanium dioxide thin film has been a hot topic during the decade due to its scientific and technological importance. Among many thin film processing techniques, spray pyrolysis deposition (SPD) is one of the most promising ones, since the film formation is carried out in air by a simple apparatus. We report here TiO2 thin film synthesis by SPD from aqueous TiO2 sol. The source solution was a mixture of anatase and amorphous TiO2 sol with the molar ratio [anatase]/[amorphous]=0-2.3. The source solution was sprayed by a compressed air onto the heated glass substrate. Amorphous particles formed neck between anatase particles to produce porous TiO2 film during the phase transition to anatase at the substrate temperature above 300°C. The 5 μ-thick porous TiO2 film was prepared within 3 minutes by SPD. The surface morphology of the film was easily controlled by changing [Anatase]/[Amorphous] ratio in the source solution.
