抄録
As-deposited lead zirconate titanate (PZT) films by aerosol deposition method (ADM) do not have enough ferroelectric and/or piezoelectric properties as microactuator and microoptical devices. For increasing the film properties, rapid thermal annealing (RTA) like a laser radiation are expected. The laser can be focused and/or scanned suitably only on necessary part of system-on-a-chip (SoC) with some mirrors and lenses, and be introduced from the outside of deposition chamber through the glass window, so the deposition conditions are not almost affected by the laser radiation. Especially CO2 laser (λ=10.6μm), which has been reported to have a good absorption for the PZT films, are more excellent oscillation efficiency and running cost than YAG laser which is the same IR laser. In this study, the CO2 laser irradiated PZT films prepared by ADM have been examined by evaluating electrical properties and microstructure. (This research is partially supported by NEDO Project.)
