抄録
Integration of piezoelectric ceramics on silicon substrates is becoming very important for the applications in microelectromechanical systems (MEMS). Electrophoretic deposition is a promising process for fabricating piezoelectric ceramic films from ceramic powder, which is simple and cost-effective as compared with other existing methods. In the present study, commercial lead zirconate titanate (PZT) powders were deposited onto silicon wafers coated with Pt electrodes by electrophoretic deposition in ethanol solution. The deposition behavior was investigated by varying conditions, such as acid content (PH), applied voltages and deposition duration. The morphology and microstructures of as-deposited and sintered films were observed by scanning electron microscopy (SEM). The crystal phase and ferroelectric properties of the PZT films were analyzed to optimize the process conditions.
