抄録
The fabrication of ceramic-layers using the electrospray pyrolysis method has been attractive because of the simplicity. Although conductive substrates were normally used in the electrospray, insulator substrates like glass and alumina are also necessary for applying the layers as electroceramics. In this work, the deposition mechanism is investigated in respect of the charge neutralization of the generated droplet/particle. The particle layer of SnO2 deposited onto glass substrates exhibited the high sensitivity against H2. The layer thickness increases with the spray time. The particle sizes varied between 80 and 150 nm due to spraying conditions and these values were comparable to the estimated from the droplet size in Gañán-Calvo′s empirical formula.