抄録
Yttria stabilized zirconia (YSZ) films have been used for thermal barrier coatings (TBCs) of gas turbines due to superior high temperature properties. Generally, plasma spray and electron-beam physical vapor deposition (EB-PVD) have been employed in practical applications for TBCs. Although chemical vapor deposition (CVD) can provide high quality coatings, the deposition rates of CVD has been regarded as being too small for TBCs. This paper reviews the synthesis of ZrO2 and YSZ films by conventional CVD and plasma CVD in literatures, and reports our recent achievement on remarkably high-speed deposition of YSZ films by a new laser CVD process.
