日本セラミックス協会 年会・秋季シンポジウム 講演予稿集
16th Fall Meeting of The Ceramic Society of Japan & The 5th International Meeting of Pacific Rim Ceramic Societies(PacRim5)
セッションID: 12-O-09
会議情報

Fabrication of Highly Porous Alumina Nanostructures on Glass by Sputtering Deposition and Anodization
*Song-Zhu CHUSatoru INOUEKenji WADASin-ichi TODOROKIMasafumi ISOGAIAtsuo YASUMORI
著者情報
会議録・要旨集 フリー

詳細
抄録
Various porous alumina nanostructures were fabricated on glass substrates by combining technologies of sputtering deposition and anodization. Highly pure aluminum layers were first sputter-deposited on ITO/glass or Ti/glass substrates and then anodically oxidized in various acid solutions to form porous alumina films with nanopores of Φ 4~400 nm in diameters. Two types of porous nanostructures, ordered-type with parallel channels and branch-type with coral channels, can be achieved by adjusting the fabricating conditions. The anodic alumina films possess highly porous nanostructures with pore density of 5~80 x 1013 pore/m2 and exhibit a high transmittance in 70~95%T (vs. glass) throughout ultraviolet and visible light range. The porous alumina nanostructures can be utilized as templates or carriers to fabricate various integrated or composite nanostructures for versatile applications such as photocatalysis, dye-sensitive photocells, perpendicular magnetic recoding, photonics, etc.
著者関連情報
© The Ceramic Society of Japan 2003
前の記事 次の記事
feedback
Top