An Effect of Au on ZnO Growth Characteristics during the Chemical Vapor Deposition

抄録

An effect of Au on the growth characteristic of ZnO thin film during chemical vapor deposition (CVD) was studied. The Au coating on the substrate changes the hexagonal ZnO grains to an irregular disk shape. The presence of Au in the film was confirmed from absorption at a wavelength of around 610 nm in the transmittance spectrum and from the Au (111) peak in XRD analysis. Impurity analysis indicated the selective incorporation of impurities at the edges of the disk-shaped grains, and a lack of Au on the thin film surface. These findings indicate that the Au causes the ZnO nucleation reaction on the substrate and the growth characteristic of the resulting ZnO film.