日本セラミックス協会 年会・秋季シンポジウム 講演予稿集
16th Fall Meeting of The Ceramic Society of Japan & The 5th International Meeting of Pacific Rim Ceramic Societies(PacRim5)
セッションID: 15-P-15
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Electroless Selective Deposition of Copper and Copper Oxide on PET Surface
*Makoto TERANISHIPeixin ZHUYoshitake MASUDAKunihito KOUMOTO
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会議録・要旨集 フリー

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抄録
A remarkable progress has been achieved in development of flexible display in recent years, where deposition of metal and functional thin films on the polymer substrates is a very important technology. CVD and sputtering have been currently employed to prepare thin films. However, there are few reports regarding the formation of thin films on polymer substrates via the interfacial reaction of self-assembled monolayers (SAMs) at low temperatures. For this purpose, the key point is how to make SAMs on polymer substrates. In the present study, hydroxyl terminals were formed on polyethylene terephthalate (PET) surfaces through hydrophilization (UV irradiation, NaOH treatment, etc.). After that, SAMs with different head groups (alkyl, amino, phenyl, etc.) were successfully fabricated via dehydration condensation between hydroxyl terminals and organic silane reagents. Consequently, the selective deposition of copper and copper (I) oxide was successfully achieved on PET substrates modified with SAMs in an electroless solution.
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© The Ceramic Society of Japan 2003
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