日本セラミックス協会 年会・秋季シンポジウム 講演予稿集
16th Fall Meeting of The Ceramic Society of Japan & The 5th International Meeting of Pacific Rim Ceramic Societies(PacRim5)
セッションID: 16-I-02
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A Study on Recycling of Waste Scraps from Process of Silicon-Single-Crystal for Semiconductors as EMC Compounds
Sang Hoon LEE*Hiroshi OKAMOTO
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抄録
The quartz-glassy crucible waste scrap have simply reused for refractory raw-materials, or exhausted. This study is concerned on the advanced recycling-technology that is obtained by the proper micro-particle preparation process in order to fabricate fine amorphous silica filler for EMC. Therefore, this paper will deal with the physical, chemical and thermal pre-treatment process for efficient impurity removal and with the proper micro-particle process for producing the amorphous silica-filler.In view of the results, if the chemical, physical and thermal pre-treatment process for effective elimination of impurity was passed, the purity of wasted fused glassy crucible is almost equal to the its of first anhydrous quartz glass. Thus, it was understood that this wasted fused glassy crucible was sufficient value of recycling, though it was damaged. When the ingot was fabricated, Phase transformation of crystallization by heat treatment was not changed. So, as it is, recycling possibility was very high.
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© The Ceramic Society of Japan 2003
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