Direct micropatterning and dielectric characteristics of nanostructured titanium dioxide thin film on the self-aasembled monolayers in a peroxotitanate aqueous solution

Abstract

Micropatterned titanium dioxide thin films composed of densely packed nanometer-sized grains were successfully deposited using a simple, inexpensive, and environmentally-friendly method from a peroxotitanate aqueous solution on the self-assembled monolayers at room temperature. Anatase TiO2 thin films were obtained by heating the as-deposited thin films at 500°C for 1 h in air. For the as-deposited thin film, a chemical composition of TiO1.4(O2)0.5(OH)0.2.34H2O was proposed based on XPS, FT-IR and TG-DTA analysis. The band gap, hydrophilicity and dielectric properties of the as-deposited thin film were characterized.