Patterning of Three-Dimensional Ordered Small Dots Using Micro Electrophoretic Deposition Process

Abstract

A novel particle assembling technique using a local electric field has been investigated by electrophoretic deposition technique using a very small counter electrode (microelectrode), this is so-called μ-EPD process. Polystyrene microspheres (φ= 320 nm) were used as dispersed particles in ethanol suspension. A micrometer-size dots and its patterning can be successfully formed onto a desired position of an ITO-coated glass substrate by using this μ-EPD process.