抄録
High purity silicon carbide ceramics are requested for semiconductor industries. Although the carbothermic reduction process of silica by carbon has been widely used to produce silicon carbide ceramics at present, some additional treatments to remove unreacted silica and carbon are usually required in this process. On the other hand, precursor processing is attractive for synthesizing pure ceramic materials by using liquid compounds containing much less metallic impurities. In this study, chemical processing of preceramic precursors was investigated in order to synthesize silicon carbide powders, in view of process efficiency and powder properties.
