Interfacial polarization and enormous dielectric permittivity induced in Dielectric/Conductive hybrid thin films

Abstract

SrRuO3 thin films were fabricated on SrTiO3 (100) substrate by RF magnetron spatter method as the bottom electrode. Dielectric/Conductive hybrid thin films that SrRuO3 molecular layers were introduced into the SrTiO3 thin films were prepared by molecular beam epitaxy (MBE) on SrRuO3 bottom electrode. RHEED oscillations indicated that two-dimensional layer-by-layer growth were achieved. The capacitance and dielectric loss were measured by impedance analyzer. Hybrid thin films showed larger capacitance than normal SrTiO3 thin films.