Abstract
We already reported the preparation of Y2O3 and TiO2 precursor aqueous solutions. Clear and colorless Y2Ti2O7 precursor aqueous solution was prepared by mixing Y2O3 precursor solution with TiO2 precursor solution ( Y : Ti = 1 : 1, molar ratio ). The Y2Ti2O7 thin films were prepared using the spin-coating. The crystalline Y2Ti2O7 thin films were obtained after annealing treatment above 750oC.