白色光の干渉を利用した非接触膜厚計
1979 年 42 巻 5 号 p. 314-319
詳細
1979 年 42 巻 5 号 p. 314-319
An automatic white-light interferometric thickness meter, which is suitable for the measurement of moving transparent double layer films, has been developed. According to our experiment, the desiable difference of refractive indicies was more than 0.3. The measuring accuracy of thickness meter was within ±0.5 μm tolerances which satisfied our intension.
