Q-Mass Study on Cooperation Process of PCVD and Spattering for 1 nm Thickness Semi-conductive C-Au-S Film

Abstract

Q-mass spectroscopic measurement confirmed a HF dissociation reaction and a C-Au-S molecule synthesis during cooperation process of plasma CVD and sputtering. Then the C-Au-S molecule was expected to compose conductive grains in C-Au-S films. The semi-conductive C-Au-S film at 1 nm thickness worked successfully in a PVDF ferroelectric electron emitter by a polarization inversion method. The chemical reactions in the cooperation plasma process were discussed.