Polymers with Base-amplifying Side Chains. Synthesis and Properties

Journal of Photopolymer Science and Technology

Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244

Polymers with Base-amplifying Side Chains. Synthesis and Properties

Kunihiro Ichimura, Akira Igarashi, Koji Arimitsu, Takahiro Seki

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Keywords: base proliferation, 9-fluorenylmethyl carbamate, photobase generator, positive-type resist

JOURNAL FREE ACCESS

2004 Volume 17 Issue 3 Pages 433-434

DOI https://doi.org/10.2494/photopolymer.17.433

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© 2004 The Society of Photopolymer Science and Technology (SPST)

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