2006 年 19 巻 2 号 p. 203-208
Organic light emitting diodes (OLEDs) with thin-film passivation and plastic substrates are expected to provide a means of producing next-generation flat-panel displays that are thin, lightweight, and flexible. Thick silicon nitride (SiNx) films fabricated by a plasma-CVD method are already recognized as being a practical passivation film for OLEDs, but these are not suitable for flexible applications for automobiles as cracks are generated in the films as a result of the bending or thermal stress. To overcome this problem, we have developed plasma-CVD SiNx/ plasma-polymerized hydrogenated carbon nitride (CNx:H) multi-layer films and epoxy substrates that increase the longevity of passivated OLEDs in flexible applications for automobiles. The films exhibit a high barrier performance against moisture even in high stress conditions, because the stress in the films is released by the soft CNx:H layers and no cracks are produced. The epoxy substrates also show good stability at high temperatures because of their high glass transition temperature. Indeed, the OLED thus formed lasted over 1000 hours in driving tests at 85oC, that is the temperature which can arise in automobiles.