Investigation of Polymer-bound PAGs: Synthesis, Characterization and Initial Structure/Property Relationships of Anion-bound Resists
公開日: 2009/07/20 |
22 巻
1 号
p. 25-29
Robert D. Allen, Phillip J. Brock, Young-Hye Na, Mark H. Sherwood, Hoa D. Truong, Gregory M. Wallraff, Masaki Fujiwara, Kazuhiko Maeda