Localized Deposition Technique using an Atmospheric-pressure Microplasma Jet for On-demand Material Processing

抄録

We developed localized deposition techniques using an atmospheric-pressure microplasma for on-demand material processing in which only the desired amount of material was prepared at low energy and assembled at a specified location in a one-step process under atmospheric pressure in ambient air. In this paper, we introduce two techniques developed by wire spraying and a technique using liquids as raw materials. These techniques enable us to deposit a wide variety of materials on a specified local area without using toxic gases and can be expected to be useful for on-demand processing