STW Gas Sensors using Microplasma-Polymerized Films

Hiromi Yatsuda; Makoto Nara; Toshimasa Mori; Kazuo Terashima; Hidenobu Aizawa; Shigeru Kurosawa

doi:10.2494/photopolymer.20.251

Hiromi Yatsuda, Makoto Nara, Toshimasa Mori, Kazuo Terashima, Hidenobu Aizawa, Shigeru Kurosawa

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Keywords: STW gas sensor, microplasma, quarts crystal microbalance, plasma polymerized film, styrene, ethanol

JOURNAL FREE ACCESS

2007 Volume 20 Issue 2 Pages 251-254

DOI https://doi.org/10.2494/photopolymer.20.251

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Abstract

The aim of our study is to develop wearable environmental gas sensing system using surface transverse wave (STW) sensor device coated with microplasma-polymerized (MPP) films as gas molecular recognition compornents of STW gas sensor. In this paper, STW devices coated with styrene films using the microplasma-polymerization technique under atmospheric pressure were evaluated the gas sorption propertiy for water vapor and ethanol, respectively.

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