Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane (HSQ)
Ken-ichiro Nakamatsu, Kiyoshi Ishikawa, Noriaki Taneichi, Shinji Matsui
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Keywords: hydrogen silsesquioxane (HSQ), ladder structure, caged structure, room temperature, nanoimprint
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2007 Volume 20 Issue 4 Pages 555-558

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© 2007 The Society of Photopolymer Science and Technology (SPST)
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