Abstract
Interaction acting between a micro tip and a micro bubble formed on a thin film surface of ArF excimer resist can be analyzed quantitatively by using atomic force microscope (AFM). The semi-sphere area of the observed bubble is approximately 25μm diameter and 0.72μm height. By approaching the AFM tip onto the bubbles in deionizad water, repulsive and attractive forces can be detected. These phenomena can be discussed on the basis of Laplace pressure. The AFM tip is more likely to indent into the bubbles compared with the resist film. The indentation analysis of the AFM tip is effective in order to identify the bubbles and to distinguish from other solid particles.
