Analysis of Micro Meniscus Shape by Light Scattering

Abstract

It is important to analyze a micro meniscus shape formed at a small nozzle apex in order to optimize a dispense performance in liquid spin coating. A meniscus bridge of deionized (DI) water is formed at a small gap between two nozzles and its curvature radius is changed due to water evaporation. When the incident light enters the meniscus bridge, the light is scattered depending on the meniscus shape. By monitoring the permitted light intensity passed through the meniscus bridge, the formation and vanishing mechanisms of the meniscus bridge can be discussed.