2007 Volume 20 Issue 6 Pages 799-803
We have developed water vapor sensing system using surface transverse wave (STW) sensor device coated with microplasma-polymerized allylamine film (MPPAF) as gas molecular recognition component of STW gas sensor system. In this paper, STW sensor devices coated with MPPAF prepared by microplasma-polymerization technique under atmospheric pressure was evaluated the gas sorption property for water vapor. MPPAF showed an excellent stability in repeated usage of the gas sorption and desorption cycles.