Photo Definable High Dielectric Constant Organic/Inorganic Hybrid Material

Abstract

Photo definable high dielectric constant organic-inorganic hybrid material has been developed. BaTiO₃ submicron particles were heavily loaded as much as 87 vol% to photo sensitive polyimide. Patternability of line / space 20 /20 μm were demonstrated. Some of material characteristics of the cured films were investigated. The relative dielectric constants were 53 at 1 kHz and 42 at 12 GHz. The volume resistivity was .7 x 10^-12Ωcm. 5 %weight loss temperature was 420°C. Insulation reliability test was also implemented and there was no degradation in the test of Cu 10 μm gap comb type electrodes with applied voltage 20 V at 85°C/85%Rh for 1000 hours.