Adsorption of Micro Tip on Various Surface Energy Substrates

Abstract

Interaction in liquid medium has been focused for analyzing pattern development, pattern plating, wet etching and cleaning. Adsorption forces due to surface energy of a micro tip and various inorganic substrates can be measured in liquid environment. Hamaker constant between two surfaces is determined based on Lifshitz theory. In liquid condition, Hamaker constant in this system is proportional to adhesion force between the tip and substrates. Experimental value of Hamaker constant indicates good agreement with that of theoretical one.