Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Supercritical Carbon Dioxide Compatible Salts: Synthesis and Application to Next Generation Lithography
Manabu TanakaAbhinav RastogiNelson M. FelixChrisopher Ober
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2008 Volume 21 Issue 3 Pages 393-396

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© 2008 The Society of Photopolymer Science and Technology (SPST)
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