Evaluation of Fluorinated Diamond Like Carbon as Antisticking Layer by Scanning Probe Microscopy
Makoto Okada, Masayuki Iwasa, Ken-ichiro Nakamatsu, Noriko Yamada, Kazuhiro Kanda, Yuichi Haruyama, Shinji Matsui
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Keywords:
UV nanoimprint lithography,
electrodeposition,
chemical mechanical polishing,
magnetic nanodots array
2008 Volume 21 Issue 4 Pages 597-599
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Article 1st page
