Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Characterization of Nanoimprint Resin and Antisticking Layer by Scanning Probe Microscopy
Makoto Okada, Yuji Kang, Ken-ichiro Nakamatsu, Masayuki Iwasa, Kazuhiro Kanda, Yuichi Haruyama, Shinji Matsui
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Keywords: nanoimprint lithography, scanning probe microscopy, antisticking layer, nanoimprint resin
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2009 Volume 22 Issue 2 Pages 167-169

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© 2009 The Society of Photopolymer Science and Technology (SPST)
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