Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
The Late Dr. Hiroshi Ito Memorial Issue
Mituru Ueda
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2009 Volume 22 Issue 6 Pages 753

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Abstract

Dr. Hiroshi Ito, the inventor of Chemical Amplification Resists for Microlithography, and an IBM fellow, passed away on June 19, 2009. It is a great sadness and large loss for the photoresist society.

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© 2009 The Society of Photopolymer Science and Technology (SPST)
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