Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Effect of Annealing on DLC Characteristics by ESR Spectral Analysis
Yukinori Yamauchi, Yasushi Sasai, Shinichi Kondo, Masayuki Kuzuya
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Keywords: Diamond-like carbon (DLC) film, Electron spin resonance (ESR), Plasma enhanced chemical vapor deposition (PECVD), Dangling-bond site (DBS)
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2010 Volume 23 Issue 4 Pages 541-544

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© 2010 The Society of Photopolymer Science and Technology (SPST)
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