Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
PAG Concentration Dependence of the Vertical Density Profile in Photoresist
Jae Hyun Kim, Sung II Ahn, Yong-ho Kim, Jin Goo Yoon, Wang-Cheol Zin, Seung-Ki Chae
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Keywords: PAG distribution, photoresist, X-ray reflectivity
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2010 Volume 23 Issue 5 Pages 709-713

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© 2010 The Society of Photopolymer Science and Technology (SPST)
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